Analysis and design of a capacitive accelerometer based on an electrostatically levitated micro-disk.
Houlihan, Ruth, Kukarenka, A, Gindila, M and Kraft, Michael (2001) Analysis and design of a capacitive accelerometer based on an electrostatically levitated micro-disk. Proceedings SPIE Conference on Micromechanics Europe, Cork, Ireland, , 305-308.
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| Item Type: | Conference or Workshop Item (UNSPECIFIED) |
|---|---|
| Additional Information: | Event Dates: 2001 |
| Divisions: | Faculty of Physical and Applied Science > Electronics and Computer Science > NANO |
| Item ID: | 257822 |
| Date Deposited: | 26 Jun 2003 |
| Last Modified: | 01 Mar 2012 10:53 |
| Contributors: | Houlihan, Ruth (Author) Kukarenka, A (Author) Gindila, M (Author) Kraft, Michael (Author) |
| Date: | 2001 |
| Additional Information: | Event Dates: 2001 |
| Status: | Published |
| Further Information: | Google Scholar |
| ISI Citation Count: | 0 |
| URI: | http://eprints.soton.ac.uk/id/eprint/257822 |
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