Analysis and design of a capacitive accelerometer based on an electrostatically levitated micro-disk.


Houlihan, Ruth, Kukarenka, A, Gindila, M and Kraft, Michael (2001) Analysis and design of a capacitive accelerometer based on an electrostatically levitated micro-disk. Proceedings SPIE Conference on Micromechanics Europe, Cork, Ireland, , 305-308.

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Additional Information: Event Dates: 2001
Divisions: Faculty of Physical Sciences and Engineering > Electronics and Computer Science > NANO
ePrint ID: 257822
Date Deposited: 26 Jun 2003
Last Modified: 27 Mar 2014 20:00
Further Information:Google Scholar
ISI Citation Count:0
URI: http://eprints.soton.ac.uk/id/eprint/257822

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