Modelling And Analysis Of A MEMS Approach To DC Voltage Step Up Conversion
Modelling And Analysis Of A MEMS Approach To DC Voltage Step Up Conversion
This paper studies the principle of a voltage step-up converter based on a micromachined variable parallel-plate capacitor in combination with an electrostatic actuator. Electrical equivalent circuit and system-level SIMULINK models have been developed. An analysis of design parameters serves as a starting point for a novel prototype implementation. Possible areas of application are self-powered, standalone sensing systems, space applications and any kind of electrostatic or piezoelectric microsystem in general.
Electromechanical voltage conversion, electrostatic microstructures, MEMS modelling
235-238
Haas, Christoph
cab561ea-79ac-492e-8e08-f6a902476d94
Kraft, Michael
54927621-738f-4d40-af56-a027f686b59f
2003
Haas, Christoph
cab561ea-79ac-492e-8e08-f6a902476d94
Kraft, Michael
54927621-738f-4d40-af56-a027f686b59f
Haas, Christoph and Kraft, Michael
(2003)
Modelling And Analysis Of A MEMS Approach To DC Voltage Step Up Conversion.
14th Micromechanics Europe Workshop, Delft, The, Netherlands.
02 - 04 Nov 2003.
.
Record type:
Conference or Workshop Item
(Paper)
Abstract
This paper studies the principle of a voltage step-up converter based on a micromachined variable parallel-plate capacitor in combination with an electrostatic actuator. Electrical equivalent circuit and system-level SIMULINK models have been developed. An analysis of design parameters serves as a starting point for a novel prototype implementation. Possible areas of application are self-powered, standalone sensing systems, space applications and any kind of electrostatic or piezoelectric microsystem in general.
Text
MEMS_VOLTAGE_CONVERTERS.pdf
- Other
More information
Published date: 2003
Additional Information:
Event Dates: 2-4 November 2003
Venue - Dates:
14th Micromechanics Europe Workshop, Delft, The, Netherlands, 2003-11-02 - 2003-11-04
Keywords:
Electromechanical voltage conversion, electrostatic microstructures, MEMS modelling
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 258583
URI: http://eprints.soton.ac.uk/id/eprint/258583
PURE UUID: 9686b116-1789-403d-b8f8-3a9b4b2befdc
Catalogue record
Date deposited: 18 Nov 2003
Last modified: 14 Mar 2024 06:10
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Contributors
Author:
Christoph Haas
Author:
Michael Kraft
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