Advanced control systems for MEMS capacitive sensing accelerometers
Mokhtari, M and Kraft, M (2003) Advanced control systems for MEMS capacitive sensing accelerometers. At 14th MicroMechanics Europe Workshop, Delft, The , Netherlands, 04 - 02 Nov 2003. , 231-234.
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Description/Abstract
This paper presents the use of a multi stage noise shaping (MASH) architecture to enhance the performance of closed loop capacitive inertial sensors which employ sigma-delta modulation as their method of force balancing. By means of simulation it has been shown that the performance of the accelerometer can be improved by as much as 20dB. The approach has been applied to a lateral bulk mocromachined accelerometer and results show a significant noise reduction in the baseband of the system, resulting in an improvement in the overall performance of the sensor.
| Item Type: | Conference or Workshop Item (Poster) |
|---|---|
| Additional Information: | Event Dates: 2-4th November 2003 |
| ISBNs: | 9080826618 |
| Keywords: | Capacitive sensing accelerometers, sigma-delta modulation and multi stage noise shaping (MASH) |
| Divisions: | Faculty of Physical and Applied Science > Electronics and Computer Science > NANO |
| Item ID: | 258600 |
| Date Deposited: | 24 Nov 2003 |
| Last Modified: | 01 Mar 2012 10:56 |
| Contributors: | Mokhtari, M (Author) Kraft, M (Author) |
| Date: | 2003 |
| Additional Information: | Event Dates: 2-4th November 2003 |
| Status: | Published |
| Further Information: | Google Scholar |
| URI: | http://eprints.soton.ac.uk/id/eprint/258600 |
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