Realisation of electroplating moulds with different thick photoresists for MEMS applications


Kukharenka, E, Kraft, M and Hollinshead, N (2004) Realisation of electroplating moulds with different thick photoresists for MEMS applications. At Eurosensors XIV Conference, Prague, Czech Republic, 15 - 18 Sep 2002. , 103-104.

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Item Type: Conference or Workshop Item (Poster)
Additional Information: Event Dates: September 15-18, 2002
Divisions: Faculty of Physical Sciences and Engineering > Electronics and Computer Science > NANO
Faculty of Physical Sciences and Engineering > Electronics and Computer Science > EEE
ePrint ID: 259080
Date Deposited: 22 Oct 2004
Last Modified: 27 Mar 2014 20:01
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/259080

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