Realisation of electroplating moulds with different thick photoresists for MEMS applications
Kukharenka, E, Kraft, M and Hollinshead, N (2004) Realisation of electroplating moulds with different thick photoresists for MEMS applications. At Eurosensors XIV Conference, Prague, Czech Republic, 15 - 18 Sep 2002. , 103-104.
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| Item Type: | Conference or Workshop Item (Poster) |
|---|---|
| Additional Information: | Event Dates: September 15-18, 2002 |
| Divisions: | Faculty of Physical and Applied Science > Electronics and Computer Science > NANO Faculty of Physical and Applied Science > Electronics and Computer Science > EEE |
| Item ID: | 259080 |
| Date Deposited: | 22 Oct 2004 |
| Last Modified: | 02 Mar 2012 12:19 |
| Contributors: | Kukharenka, E (Author) Kraft, M (Author) Hollinshead, N (Author) |
| Date: | 2004 |
| Additional Information: | Event Dates: September 15-18, 2002 |
| Status: | Published |
| Further Information: | Google Scholar |
| URI: | http://eprints.soton.ac.uk/id/eprint/259080 |
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