Thick-film PZT-metallic triple beam resonator
Yan, T, Jones, B E, Rakowski, R T, Beeby, S P, Tudor, M J and White, N M (2003) Thick-film PZT-metallic triple beam resonator. Electronics Letters, 39, (13), 982-983.
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Description/Abstract
A metallic triple-beam resonator with thick-film piezoelectric elements to drive and detect the vibrations is presented. The resonator substrate was fabricated by a double-sided photochemical etching technique and the thick-film piezoelectric elements were deposited by a standard screen-printing process. The resonator, 15.5mm long and 7mm wide, has a favoured mode at 6.2 kHz with a Q-factor of 3100.
| Item Type: | Article |
|---|---|
| ISSNs: | 0013-5194 |
| Keywords: | metallic resonators, thick-film piezoelectrics, Remise |
| Divisions: | Faculty of Physical and Applied Science > Electronics and Computer Science > EEE |
| Item ID: | 259269 |
| Date Deposited: | 20 Apr 2004 |
| Last Modified: | 26 Apr 2013 03:07 |
| Contributors: | Yan, T (Author) Jones, B E (Author) Rakowski, R T (Author) Beeby, S P (Author) Tudor, M J (Author) White, N M (Author) |
| Date: | June 2003 |
| Status: | Published |
| Publisher: | IEE |
| Further Information: | Google Scholar |
| ISI Citation Count: | 7 |
| URI: | http://eprints.soton.ac.uk/id/eprint/259269 |
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