Metallic Triple Beam Resonator with Thick-film Printed Drive and Pickup
Yan, T, Jones, B E, Rakowski, R T, Tudor, M J, Beeby, S P and White, N M (2003) Metallic Triple Beam Resonator with Thick-film Printed Drive and Pickup. At The 17th European Conference on Solid State Transducers (Eurosensors XVII), Guimaraes, Portugal, 24 - 21 Sep 2003. University of Minho, 10-13.
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Description/Abstract
A triple beam resonator fabricated in 430S17 stainless steel with thick-film piezoelectric elements to drive and detect the vibrations is presented. The resonator substrate was fabricated by a simultaneous, double-sided photochemical etching technique and the thick-film piezoelectric elements were deposited by a standard screen-printing process. The combination of these two batch-fabrication processes provides the opportunity for mass production of the device at low cost. The resonator, a dynamically balanced triple beam tuning fork (TBTF) structure 23.5 mm long and 6.5 mm wide, has a favoured mode at 4.96 kHz with a Q-factor of 3630 operating in air.
| Item Type: | Conference or Workshop Item (Speech) |
|---|---|
| Additional Information: | Event Dates: 21-24th September |
| Divisions: | Faculty of Physical and Applied Science > Electronics and Computer Science |
| Item ID: | 259272 |
| Date Deposited: | 20 Apr 2004 |
| Last Modified: | 02 Mar 2012 02:29 |
| Contributors: | Yan, T (Author) Jones, B E (Author) Rakowski, R T (Author) Tudor, M J (Author) Beeby, S P (Author) White, N M (Author) |
| Date: | 2003 |
| Additional Information: | Event Dates: 21-24th September |
| Status: | Published |
| Publisher: | University of Minho |
| Further Information: | Google Scholar |
| URI: | http://eprints.soton.ac.uk/id/eprint/259272 |
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