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Experimental investigation into the effect of substrate clamping on the piezoelectric behaviour of thick-film PZT elements

Experimental investigation into the effect of substrate clamping on the piezoelectric behaviour of thick-film PZT elements
Experimental investigation into the effect of substrate clamping on the piezoelectric behaviour of thick-film PZT elements
This paper details an experimental investigation of the clamping effect associated with thick-film piezoelectric elements printed on a substrate. The clamping effect reduces the measured piezoelectric coefficient, d33, of the film. This reduction is due to the influence of the d31 component in the film when a deformation of the structure occurs, by either the direct or indirect piezoelectric effect. Theoretical analysis shows a reduction in the measured d33 of 62%, i.e. a standard bulk lead zirconate titanate (PZT)-5H sample with a manufacturer specified d33 of 593pC/N would fall to 227.8pC/N. To confirm this effect, the d33 coefficients of five thin bulk PZT-5H samples of 220µm thickness were measured before and after their attachment to a metallized 96% alumina substrate. The experimental results show a reduction in d33 of 74% from 529pC/N to 139pC/N. The theoretical analysis was then applied to existing University of Southampton thick-film devices. It is estimated that the measured d33 value of 131pC/N of the thick-film devices is the equivalent of an unconstrained d33 of 345pC/N.
piezoelectrics, thick-film, clamping effect
0022-3727
1074-1078
Torah, R N
7147b47b-db01-4124-95dc-90d6a9842688
Beeby, S P
ba565001-2812-4300-89f1-fe5a437ecb0d
White, N M
c7be4c26-e419-4e5c-9420-09fc02e2ac9c
Torah, R N
7147b47b-db01-4124-95dc-90d6a9842688
Beeby, S P
ba565001-2812-4300-89f1-fe5a437ecb0d
White, N M
c7be4c26-e419-4e5c-9420-09fc02e2ac9c

Torah, R N, Beeby, S P and White, N M (2004) Experimental investigation into the effect of substrate clamping on the piezoelectric behaviour of thick-film PZT elements. Journal of Physics D: Applied Physics, 37, 1074-1078.

Record type: Article

Abstract

This paper details an experimental investigation of the clamping effect associated with thick-film piezoelectric elements printed on a substrate. The clamping effect reduces the measured piezoelectric coefficient, d33, of the film. This reduction is due to the influence of the d31 component in the film when a deformation of the structure occurs, by either the direct or indirect piezoelectric effect. Theoretical analysis shows a reduction in the measured d33 of 62%, i.e. a standard bulk lead zirconate titanate (PZT)-5H sample with a manufacturer specified d33 of 593pC/N would fall to 227.8pC/N. To confirm this effect, the d33 coefficients of five thin bulk PZT-5H samples of 220µm thickness were measured before and after their attachment to a metallized 96% alumina substrate. The experimental results show a reduction in d33 of 74% from 529pC/N to 139pC/N. The theoretical analysis was then applied to existing University of Southampton thick-film devices. It is estimated that the measured d33 value of 131pC/N of the thick-film devices is the equivalent of an unconstrained d33 of 345pC/N.

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Published date: 2004
Keywords: piezoelectrics, thick-film, clamping effect
Organisations: EEE

Identifiers

Local EPrints ID: 259306
URI: http://eprints.soton.ac.uk/id/eprint/259306
ISSN: 0022-3727
PURE UUID: 5edcb81e-6e03-4c3e-9a3f-2228b540c6a4
ORCID for R N Torah: ORCID iD orcid.org/0000-0002-5598-2860
ORCID for S P Beeby: ORCID iD orcid.org/0000-0002-0800-1759
ORCID for N M White: ORCID iD orcid.org/0000-0003-1532-6452

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Date deposited: 30 Apr 2004
Last modified: 15 Mar 2024 03:20

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Contributors

Author: R N Torah ORCID iD
Author: S P Beeby ORCID iD
Author: N M White ORCID iD

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