Silicon resonant strain gauges fabricated using SOI wafers


Beeby, S, Ensell, G, Tudor, M and White, N (2000) Silicon resonant strain gauges fabricated using SOI wafers. At Demonstrated techniques for Industry Seminar, Birmingham, UK,

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Item Type: Conference or Workshop Item (Speech)
Additional Information: Event Dates: 29th March 2000
Divisions: Faculty of Physical and Applied Science > Electronics and Computer Science > NANO
Item ID: 259392
Date Deposited: 26 May 2004
Last Modified: 02 Mar 2012 12:58
Contributors: Beeby, S (Author)
Ensell, G (Author)
Tudor, M (Author)
White, N (Author)
Date: 2000
Additional Information: Event Dates: 29th March 2000
Status: Published
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/259392

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