Fabrication and test of thermal vertical bimorph actuators for movement in the wafer plane
Sehr, H, Brunnschweiler, A, Evans, A, Ensell, G and Niblock, T (2000) Fabrication and test of thermal vertical bimorph actuators for movement in the wafer plane. At MME2000, Upsalla, Sweden,
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| Item Type: | Conference or Workshop Item (Speech) |
|---|---|
| Additional Information: | Event Dates: October 2000 |
| Divisions: | Faculty of Physical Sciences and Engineering > Electronics and Computer Science > NANO |
| Item ID: | 259523 |
| Date Deposited: | 07 Feb 2005 |
| Last Modified: | 14 Aug 2012 01:45 |
| Contributors: | Sehr, H (Author) Brunnschweiler, A (Author) Evans, A (Author) Ensell, G (Author) Niblock, T (Author) |
| Date: | October 2000 |
| Additional Information: | Event Dates: October 2000 |
| Status: | Published |
| Further Information: | Google Scholar |
| ISI Citation Count: | 21 |
| URI: | http://eprints.soton.ac.uk/id/eprint/259523 |
Available Versions of this Item
- Fabrication and test of thermal vertical bimorph actuators for movement in the wafer plane. (deposited 07 Feb 2005) [Currently Displayed]
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