Fabrication and test of thermal vertical bimorph actuators for movement in the wafer plane


Sehr, H, Brunnschweiler, A, Evans, A, Ensell, G and Niblock, T (2000) Fabrication and test of thermal vertical bimorph actuators for movement in the wafer plane. At MME2000, Upsalla, Sweden,

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Item Type: Conference or Workshop Item (Speech)
Additional Information: Event Dates: October 2000
Divisions: Faculty of Physical Sciences and Engineering > Electronics and Computer Science > NANO
ePrint ID: 259523
Date Deposited: 07 Feb 2005
Last Modified: 27 Mar 2014 20:02
Further Information:Google Scholar
ISI Citation Count:21
URI: http://eprints.soton.ac.uk/id/eprint/259523

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