Realisation of electroplating moulds with thick positive SPR220-7 photoresist


Koukharenka, Elena and Kraft, Michael (2002) Realisation of electroplating moulds with thick positive SPR220-7 photoresist. At , the 4th International Conference on Material for Microelectronics and Nanoengineering, , ESPOO, Finland, , 165-168.

Download

Full text not available from this repository.

Item Type: Conference or Workshop Item (Poster)
Additional Information: Event Dates: 2002
Divisions: Faculty of Physical Sciences and Engineering > Electronics and Computer Science > NANO
Faculty of Physical Sciences and Engineering > Electronics and Computer Science > EEE
ePrint ID: 259806
Date Deposited: 26 Oct 2004
Last Modified: 27 Mar 2014 20:02
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/259806

Actions (login required)

View Item View Item