Fabrication of miromirrors with pyramidal shape using anisotropic etching of silicon with KOH.


Moktadir, Zak, Prakash, G V, Koukharenko, Elena, Gollasch, C, Bagnall, Darren, Kraft, Michael, Hinds, E and Baumberg, Jeremy (2004) Fabrication of miromirrors with pyramidal shape using anisotropic etching of silicon with KOH. In, Proceedings CLEO/IQEC 2004, San Francisco, California, USA,

Download

Full text not available from this repository.

Item Type: Conference or Workshop Item (Paper)
Additional Information: Event Dates: 2004
Divisions: Faculty of Physical Sciences and Engineering > Electronics and Computer Science > NANO
Faculty of Physical Sciences and Engineering > Electronics and Computer Science > EEE
ePrint ID: 259874
Date Deposited: 27 Oct 2004
Last Modified: 27 Mar 2014 20:02
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/259874

Actions (login required)

View Item View Item