Fabrication of miromirrors with pyramidal shape using anisotropic etching of silicon with KOH.


Moktadir, Zak, Prakash, G V, Koukharenko, Elena, Gollasch, C, Bagnall, Darren, Kraft, Michael, Hinds, E and Baumberg, Jeremy (2004) Fabrication of miromirrors with pyramidal shape using anisotropic etching of silicon with KOH. In, Proceedings CLEO/IQEC 2004, San Francisco, California, USA,

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Item Type: Conference or Workshop Item (Paper)
Additional Information: Event Dates: 2004
Divisions : Faculty of Physical Sciences and Engineering > Electronics and Computer Science > NANO
Faculty of Physical Sciences and Engineering > Electronics and Computer Science > EEE
ePrint ID: 259874
Accepted Date and Publication Date:
Status
2004Published
Date Deposited: 27 Oct 2004
Last Modified: 31 Mar 2016 14:01
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/259874

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