Fabrication of miromirrors with pyramidal shape using anisotropic etching of silicon with KOH.
Moktadir, Zak, Prakash, G V, Koukharenko, Elena, Gollasch, C, Bagnall, Darren, Kraft, Michael, Hinds, E and Baumberg, Jeremy (2004) Fabrication of miromirrors with pyramidal shape using anisotropic etching of silicon with KOH. In, Proceedings CLEO/IQEC 2004, San Francisco, California, USA,
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| Item Type: | Conference or Workshop Item (Paper) |
|---|---|
| Additional Information: | Event Dates: 2004 |
| Divisions: | Faculty of Physical and Applied Science > Electronics and Computer Science > NANO Faculty of Physical and Applied Science > Electronics and Computer Science > EEE |
| Item ID: | 259874 |
| Date Deposited: | 27 Oct 2004 |
| Last Modified: | 02 Mar 2012 11:40 |
| Contributors: | Moktadir, Zak (Author) Prakash, G V (Author) Koukharenko, Elena (Author) Gollasch, C (Author) Bagnall, Darren (Author) Kraft, Michael (Author) Hinds, E (Author) Baumberg, Jeremy (Author) |
| Date: | 2004 |
| Additional Information: | Event Dates: 2004 |
| Status: | Published |
| Further Information: | Google Scholar |
| URI: | http://eprints.soton.ac.uk/id/eprint/259874 |
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