Haas, Christoph H and Kraft, Michael
Modelling and analysis of a MEMS approach to dc voltage step-up conversion.
Journal of Micromech Microengineering, 14, No, .
This paper studies the principle of a novel voltage step-up converter based on a micromachined variable parallel-plate capacitor in combination with an electrostatic actuator. Electrical equivalent circuit and system-level SIMULINK models have been developed. Based on these models, an analysis of design parameters and expected device performance has been performed to serve as a starting point for a prototype implementation. Possible areas of application are self-powered, stand-alone sensing systems, aerospace applications and any kind of electrostatic or piezoelectric MEMS devices in general.
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