Gollasch, C O, Moktadir, Zak, Kraft, Michael, Bagnall, Darren, Trupke, M, Eriksson, S and Hinds, E A
A three dimensional electrostatic actuator with a locking mechanism for microcavities on atom chips.
In, 15th MicroMechanics Europe Workshop, Leuven , Belgium,
05 - 07 Sep 2004.
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We present a micromachined three-dimensional electrostatic actuator optimized for aligning and tuning optical microcavities on atom chips. The actuation in the chip plane which is used for miror positioning has a working envelope of 17 m. The design incorporates a unique locking mechanism which allows the out-of-plane actuation used for cavity tuning to be carried out once the in-plane actuation is completed. A maximum translation of 7 m can be achieved in this direction.
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A three dimensional electrostatic actuator with a locking mechanism for microcavities on atom chips. (deposited 13 Sep 2004)
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