A three dimensional electrostatic actuator with a locking mechanism for microcavities on atom chips
Gollasch, C O, Moktadir, Zak, Kraft, Michael, Bagnall, Darren, Trupke, M, Eriksson, S and Hinds, E A (2004) A three dimensional electrostatic actuator with a locking mechanism for microcavities on atom chips. In, 15th MicroMechanics Europe Workshop, Leuven , Belgium, 05 - 07 Sep 2004. , 33-36.
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We present a micromachined three-dimensional electrostatic actuator optimized for aligning and tuning optical microcavities on atom chips. The actuation in the chip plane which is used for miror positioning has a working envelope of 17 m. The design incorporates a unique locking mechanism which allows the out-of-plane actuation used for cavity tuning to be carried out once the in-plane actuation is completed. A maximum translation of 7 m can be achieved in this direction.
|Item Type:||Conference or Workshop Item (Paper)|
|Additional Information:||Event Dates: 5 - 7 September 2004|
|Divisions:||Faculty of Physical Sciences and Engineering > Electronics and Computer Science > NANO
|Date Deposited:||13 Sep 2004|
|Last Modified:||27 Mar 2014 20:02|
|Further Information:||Google Scholar|
|RDF:||RDF+N-Triples, RDF+N3, RDF+XML, Browse.|
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