A High performance accelerometer with fifth-order Sigma-Delta Modulator
Dong, Yufeng, Kraft, Michael and Gollasch, Carsten (2004) A High performance accelerometer with fifth-order Sigma-Delta Modulator. In, 15th MicroMechanics Europe Workshop, Leuven , Belgium, 05 - 07 Sep 2004. , 41-44.
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To verify the effectiveness of higher-order electromechanical sigma-delta modulator (EAM), a micromachined accelerometer is fabricated. The in-plane sensor with fully differential structure has a mechanical noise floor below static sensitivity 20pF/g and resonant frequency 325Hz. Analyses are performed to these key parameters. The silicon-on-glass sensor is fabricated by Deep Reactive Ion Etching (DRIE)and anodic bonding. Compared with a second-order electro-mechanical EAM, which only uses mechanical integration, the sensor is cascaded with additional electronic integrators to form a fifth-order electromechanical EAM, which leads to beter Signal to Quantization Noise Ratio (SQNR). Key words: Micromachined accelerometer, sigma-delta modulator.
|Item Type:||Conference or Workshop Item (Paper)|
|Additional Information:||Event Dates: 5 - 7 September 2004|
|Divisions:||Faculty of Physical Sciences and Engineering > Electronics and Computer Science > NANO
|Date Deposited:||13 Sep 2004|
|Last Modified:||27 Mar 2014 20:02|
|Further Information:||Google Scholar|
|RDF:||RDF+N-Triples, RDF+N3, RDF+XML, Browse.|
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