A High performance accelerometer with fifth-order Sigma-Delta Modulator
Dong, Yufeng, Kraft, Michael and Gollasch, Carsten (2004) A High performance accelerometer with fifth-order Sigma-Delta Modulator. In, 15th MicroMechanics Europe Workshop, Leuven , Belgium, 05 - 07 Sep 2004. , 41-44.
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Description/Abstract
To verify the effectiveness of higher-order electromechanical sigma-delta modulator (EAM), a micromachined accelerometer is fabricated. The in-plane sensor with fully differential structure has a mechanical noise floor below static sensitivity 20pF/g and resonant frequency 325Hz. Analyses are performed to these key parameters. The silicon-on-glass sensor is fabricated by Deep Reactive Ion Etching (DRIE)and anodic bonding. Compared with a second-order electro-mechanical EAM, which only uses mechanical integration, the sensor is cascaded with additional electronic integrators to form a fifth-order electromechanical EAM, which leads to beter Signal to Quantization Noise Ratio (SQNR). Key words: Micromachined accelerometer, sigma-delta modulator.
| Item Type: | Conference or Workshop Item (Paper) |
|---|---|
| Additional Information: | Event Dates: 5 - 7 September 2004 |
| ISSNs: | 9056825356 |
| Divisions: | Faculty of Physical and Applied Science > Electronics and Computer Science > NANO |
| Item ID: | 259929 |
| Date Deposited: | 13 Sep 2004 |
| Last Modified: | 05 Mar 2012 10:22 |
| Contributors: | Dong, Yufeng (Author) Kraft, Michael (Author) Gollasch, Carsten (Author) |
| Date: | 2004 |
| Additional Information: | Event Dates: 5 - 7 September 2004 |
| Status: | Published |
| Further Information: | Google Scholar |
| URI: | http://eprints.soton.ac.uk/id/eprint/259929 |
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