Dong, Yufeng, Kraft, Michael and Gollasch, Carsten
A High performance accelerometer with fifth-order Sigma-Delta Modulator.
In, 15th MicroMechanics Europe Workshop, Leuven , Belgium,
05 - 07 Sep 2004.
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To verify the effectiveness of higher-order electromechanical sigma-delta modulator (EAM), a micromachined accelerometer is fabricated. The in-plane sensor with fully differential structure has a mechanical noise floor below static sensitivity 20pF/g and resonant frequency 325Hz. Analyses are performed to these key parameters. The silicon-on-glass sensor is fabricated by Deep Reactive Ion Etching (DRIE)and anodic bonding. Compared with a second-order electro-mechanical EAM, which only uses mechanical integration, the sensor is cascaded with additional electronic integrators to form a fifth-order electromechanical EAM, which leads to beter Signal to Quantization Noise Ratio (SQNR). Key words: Micromachined accelerometer, sigma-delta modulator.
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