Design and simulation of a spring-less micro switch
Design and simulation of a spring-less micro switch
This paper reports on the design of an ultra low actuation voltage microelectromechanical systems (MEMS) switch. The mechanical design of the spring-less switch is presented. The theoretical actuation voltage of the switch is shown to be as low as 0.34 V. The concept is tested using an electrostatic levitated disc accelerometer, reconfigured to operate as a MEMS switch. Experimental and theoretical data for the dynamic behaviour of these devices are also presented. The results of this paper validate the feasibility of realising ultra low-voltage MEMS switches using electrostatic levitation.
Key words: Low actuation voltage, microelectromechanical systems (MEMS) switches, electrostatic actuation, no mechanical spring.
90-5682-535-6
57-60
Kiang, K.S.
fdb609c6-75aa-4893-85c8-8e50edfda7fe
Houlihan, Ruth
e35f2045-2362-427c-aeb3-471c55aa5a26
Gindila, M.
872ba3c2-c7d9-4fbb-81f8-b49c03c0633c
Damrongsak, B.
8bfc012a-8515-4516-b37c-f988052fffd6
Kraft, Michael
54927621-738f-4d40-af56-a027f686b59f
2004
Kiang, K.S.
fdb609c6-75aa-4893-85c8-8e50edfda7fe
Houlihan, Ruth
e35f2045-2362-427c-aeb3-471c55aa5a26
Gindila, M.
872ba3c2-c7d9-4fbb-81f8-b49c03c0633c
Damrongsak, B.
8bfc012a-8515-4516-b37c-f988052fffd6
Kraft, Michael
54927621-738f-4d40-af56-a027f686b59f
Kiang, K.S., Houlihan, Ruth, Gindila, M., Damrongsak, B. and Kraft, Michael
(2004)
Design and simulation of a spring-less micro switch.
15th MicroMechanics Europe Workshop, , Leuven, Belgium.
04 - 06 Sep 2004.
.
Record type:
Conference or Workshop Item
(Paper)
Abstract
This paper reports on the design of an ultra low actuation voltage microelectromechanical systems (MEMS) switch. The mechanical design of the spring-less switch is presented. The theoretical actuation voltage of the switch is shown to be as low as 0.34 V. The concept is tested using an electrostatic levitated disc accelerometer, reconfigured to operate as a MEMS switch. Experimental and theoretical data for the dynamic behaviour of these devices are also presented. The results of this paper validate the feasibility of realising ultra low-voltage MEMS switches using electrostatic levitation.
Key words: Low actuation voltage, microelectromechanical systems (MEMS) switches, electrostatic actuation, no mechanical spring.
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More information
Published date: 2004
Venue - Dates:
15th MicroMechanics Europe Workshop, , Leuven, Belgium, 2004-09-04 - 2004-09-06
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 259930
URI: http://eprints.soton.ac.uk/id/eprint/259930
ISBN: 90-5682-535-6
PURE UUID: 674f4268-02f6-445f-a11e-38bc6dc9d274
Catalogue record
Date deposited: 13 Sep 2004
Last modified: 11 Dec 2021 03:56
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Contributors
Author:
Ruth Houlihan
Author:
M. Gindila
Author:
B. Damrongsak
Author:
Michael Kraft
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