Houliham, Ruth and Kraft, Michael
Finge Capacitance Models for MEMS Devices.
In, 15th MicroMechanics Europe Workshop, Leuven , Belgium,
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Analytical models for the fringing capacitance of MEMS devices have been developed. Dimensional analysis techniques were used to determine the equation format and the results of numerical simulations enabled the extraction of the equation constants. The electrostatic fringing fields acting on rectangular micromachined capactitor structures were analysed using the finite element tool ANSYS and a behavioural model for the fringing capacitance was subsequently developed. The model is validated using simulated an measured data reported by other authors. Based on the same technique, a model for the fringing capacitance between a micromachined levitated disc and pie-shaped electrodes was also developed.
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