Fringe capacitance models for MEMS devices
Fringe capacitance models for MEMS devices
Analytical models for the fringing capacitance of MEMS devices have been developed. Dimensional analysis techniques were used to determine the equation format and the results of numerical simulations enabled the extraction of the equation constants. The electrostatic fringing fields acting on rectangular micromachined capactitor structures were analysed using the finite element tool ANSYS and a behavioural model for the fringing capacitance was subsequently developed. The model is validated using simulated an measured data reported by other authors. Based on the same technique, a model for the fringing capacitance between a micromachined levitated disc and pie-shaped electrodes was also developed.
70-75
Houliham, Ruth
65df159a-7517-49ca-b670-0f5ea26f8a54
Kraft, Michael
54927621-738f-4d40-af56-a027f686b59f
2004
Houliham, Ruth
65df159a-7517-49ca-b670-0f5ea26f8a54
Kraft, Michael
54927621-738f-4d40-af56-a027f686b59f
Houliham, Ruth and Kraft, Michael
(2004)
Fringe capacitance models for MEMS devices.
15th MicroMechanics Europe Workshop, , Leuven, Belgium.
04 - 06 Sep 2004.
.
Record type:
Conference or Workshop Item
(Paper)
Abstract
Analytical models for the fringing capacitance of MEMS devices have been developed. Dimensional analysis techniques were used to determine the equation format and the results of numerical simulations enabled the extraction of the equation constants. The electrostatic fringing fields acting on rectangular micromachined capactitor structures were analysed using the finite element tool ANSYS and a behavioural model for the fringing capacitance was subsequently developed. The model is validated using simulated an measured data reported by other authors. Based on the same technique, a model for the fringing capacitance between a micromachined levitated disc and pie-shaped electrodes was also developed.
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Published date: 2004
Venue - Dates:
15th MicroMechanics Europe Workshop, , Leuven, Belgium, 2004-09-04 - 2004-09-06
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 259931
URI: http://eprints.soton.ac.uk/id/eprint/259931
PURE UUID: 5376b148-8ea4-4d37-8fbd-97b527586459
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Date deposited: 13 Sep 2004
Last modified: 10 Dec 2021 21:07
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Contributors
Author:
Ruth Houliham
Author:
Michael Kraft
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