Integration of a two-dimensional electrostatic actuator in a new generation of atom chips
Gollasch, C O, Moktadir, Zak, Koukharenko, Elena, Kraft, Michael, Bagnall, Darren, Eriksson, S, Trupke, M and Hinds, E A (2004) Integration of a two-dimensional electrostatic actuator in a new generation of atom chips. In, Eurosensors XVIII, Rome, Italy, 13 - 15 Sep 2004.
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Description/Abstract
Summary: In this paper we present an integrated atom chip design which incorporates a micromachined electrostatic actuator for optical cavity alignment. The two-dimensional actuator is fabricated by applying deep reactive ion etching techniques (DRIE) on a silicon-on-glass wafer. An actution of 17.5 um is achievable which is sufficient to compensate for the misalignment of the optical cavity during the fabrication process.
| Item Type: | Conference or Workshop Item (Paper) |
|---|---|
| Additional Information: | Event Dates: 13 - 15 September 2004 |
| Keywords: | atom chip, actuator, electrostatic |
| Divisions: | Faculty of Physical and Applied Science > Electronics and Computer Science > NANO Faculty of Physical and Applied Science > Electronics and Computer Science > EEE |
| Item ID: | 259987 |
| Date Deposited: | 10 Feb 2005 |
| Last Modified: | 02 Mar 2012 11:59 |
| Contributors: | Gollasch, C O (Author) Moktadir, Zak (Author) Koukharenko, Elena (Author) Kraft, Michael (Author) Bagnall, Darren (Author) Eriksson, S (Author) Trupke, M (Author) Hinds, E A (Author) |
| Date: | 2004 |
| Additional Information: | Event Dates: 13 - 15 September 2004 |
| Status: | Published |
| Further Information: | Google Scholar |
| URI: | http://eprints.soton.ac.uk/id/eprint/259987 |
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