Integration of a two-dimensional electrostatic actuator in a new generation of atom chips


Gollasch, C O, Moktadir, Zak, Koukharenko, Elena, Kraft, Michael, Bagnall, Darren, Eriksson, S, Trupke, M and Hinds, E A (2004) Integration of a two-dimensional electrostatic actuator in a new generation of atom chips. In, Eurosensors XVIII, Rome, Italy, 13 - 15 Sep 2004.

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Description/Abstract

Summary: In this paper we present an integrated atom chip design which incorporates a micromachined electrostatic actuator for optical cavity alignment. The two-dimensional actuator is fabricated by applying deep reactive ion etching techniques (DRIE) on a silicon-on-glass wafer. An actution of 17.5 um is achievable which is sufficient to compensate for the misalignment of the optical cavity during the fabrication process.

Item Type: Conference or Workshop Item (Paper)
Additional Information: Event Dates: 13 - 15 September 2004
Keywords: atom chip, actuator, electrostatic
Divisions: Faculty of Physical Sciences and Engineering > Electronics and Computer Science > NANO
Faculty of Physical Sciences and Engineering > Electronics and Computer Science > EEE
ePrint ID: 259987
Date Deposited: 10 Feb 2005
Last Modified: 27 Mar 2014 20:02
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/259987

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