Solid-State Electronic Interface For A Levitated Disc Accelerometer


Gindila, M.V., Kraft, M., Houlihan, R. and Redman-White, W. (2004) Solid-State Electronic Interface For A Levitated Disc Accelerometer. In, Eurosensors XVII, Rome, Italy, 13 - 15 Sep 2004. IEEE EDS.

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Description/Abstract

An IC electronic interface for a micromachined levitated disc accelerometer, using a 0.6um CMOS technology from AustriaMicroSystems is presented. The system is based on a second order electromechanical modulator, and as the disc is electrostatically levitated there is no ohmic contact between the disc and the rest of the system. This distinguishes the pick-off circuit from a typical capacitive MEMS interface.

Item Type: Conference or Workshop Item (Paper)
Additional Information: Event Dates: 13th-15th September 2004
Keywords: capacitive MEMS interfaces, switched capacitor circuits, modulators
Divisions: Faculty of Physical Sciences and Engineering > Electronics and Computer Science > NANO
ePrint ID: 259988
Date Deposited: 28 Oct 2004
Last Modified: 27 Mar 2014 20:02
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/259988

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