Gindila, M.V., Kraft, M., Houlihan, R. and Redman-White, W.
Solid-State Electronic Interface For A Levitated Disc Accelerometer.
In, Eurosensors XVII, Rome, Italy,
13 - 15 Sep 2004.
Full text not available from this repository.
An IC electronic interface for a micromachined levitated disc accelerometer, using a 0.6um CMOS technology from AustriaMicroSystems is presented. The system is based on a second order electromechanical modulator, and as the disc is electrostatically levitated there is no ohmic contact between the disc and the rest of the system. This distinguishes the pick-off circuit from a typical capacitive MEMS interface.
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