Solid-State Electronic Interface For A Levitated Disc Accelerometer
Gindila, M.V., Kraft, M., Houlihan, R. and Redman-White, W. (2004) Solid-State Electronic Interface For A Levitated Disc Accelerometer. In, Eurosensors XVII, Rome, Italy, 13 - 15 Sep 2004. IEEE EDS.
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An IC electronic interface for a micromachined levitated disc accelerometer, using a 0.6um CMOS technology from AustriaMicroSystems is presented. The system is based on a second order electromechanical modulator, and as the disc is electrostatically levitated there is no ohmic contact between the disc and the rest of the system. This distinguishes the pick-off circuit from a typical capacitive MEMS interface.
|Item Type:||Conference or Workshop Item (Paper)|
|Additional Information:||Event Dates: 13th-15th September 2004|
|Keywords:||capacitive MEMS interfaces, switched capacitor circuits, modulators|
|Divisions:||Faculty of Physical Sciences and Engineering > Electronics and Computer Science > NANO
|Date Deposited:||28 Oct 2004|
|Last Modified:||27 Mar 2014 20:02|
|Further Information:||Google Scholar|
|RDF:||RDF+N-Triples, RDF+N3, RDF+XML, Browse.|
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