Solid-State Electronic Interface For A Levitated Disc Accelerometer
Gindila, M.V., Kraft, M., Houlihan, R. and Redman-White, W. (2004) Solid-State Electronic Interface For A Levitated Disc Accelerometer. In, Eurosensors XVII, Rome, Italy, 13 - 15 Sep 2004. IEEE EDS.
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Description/Abstract
An IC electronic interface for a micromachined levitated disc accelerometer, using a 0.6um CMOS technology from AustriaMicroSystems is presented. The system is based on a second order electromechanical modulator, and as the disc is electrostatically levitated there is no ohmic contact between the disc and the rest of the system. This distinguishes the pick-off circuit from a typical capacitive MEMS interface.
| Item Type: | Conference or Workshop Item (Paper) |
|---|---|
| Additional Information: | Event Dates: 13th-15th September 2004 |
| Keywords: | capacitive MEMS interfaces, switched capacitor circuits, modulators |
| Divisions: | Faculty of Physical and Applied Science > Electronics and Computer Science > NANO |
| Item ID: | 259988 |
| Date Deposited: | 28 Oct 2004 |
| Last Modified: | 01 Mar 2012 11:04 |
| Contributors: | Gindila, M.V. (Author) Kraft, M. (Author) Houlihan, R. (Author) Redman-White, W. (Author) |
| Date: | 2004 |
| Additional Information: | Event Dates: 13th-15th September 2004 |
| Status: | Published |
| Publisher: | IEEE EDS |
| Further Information: | Google Scholar |
| URI: | http://eprints.soton.ac.uk/id/eprint/259988 |
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