Modelling squeeze film effects in a MEMS accelerometer with levitated proof mass.


Houlihan, R and Kraft, M (2004) Modelling squeeze film effects in a MEMS accelerometer with levitated proof mass. Journal of Micromech Microeng, 15, (5), 803-902.

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Item Type: Article
Divisions : Faculty of Physical Sciences and Engineering > Electronics and Computer Science > NANO
ePrint ID: 260050
Accepted Date and Publication Date:
Status
2004Published
Date Deposited: 27 Oct 2004
Last Modified: 31 Mar 2016 14:01
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/260050

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