Modelling squeeze film effects in a MEMS accelerometer with levitated proof mass.
Houlihan, R and Kraft, M (2004) Modelling squeeze film effects in a MEMS accelerometer with levitated proof mass. Journal of Micromech Microeng, 15, (5), 803-902.
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| Item Type: | Article |
|---|---|
| Divisions: | Faculty of Physical and Applied Science > Electronics and Computer Science > NANO |
| Item ID: | 260050 |
| Date Deposited: | 27 Oct 2004 |
| Last Modified: | 02 Mar 2012 14:04 |
| Contributors: | Houlihan, R (Author) Kraft, M (Author) |
| Date: | 2004 |
| Status: | Published |
| Further Information: | Google Scholar |
| URI: | http://eprints.soton.ac.uk/id/eprint/260050 |
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