Novel fabrication methods for submicrometer Josephson junction qubits.

Potts, A, Routley, P R, Parker, G J and de Groot, P A J (2001) Novel fabrication methods for submicrometer Josephson junction qubits. Journal of Materials Science : Materials in Electronics, (12), 289-293.


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Novel processes for the fabrication of mesoscopic Josephson junction qubits have been developed, based on superconducting Al/Al203/Al tunnel junctions. These are fabricated by electron beam lithography using single-layer and multi-layer resists, and standard processes that are compatible with conventional CMOS processing. The new single-layer resist process is found to have significant advantages over conventional fabrication methods using suspended tri-layer masks

Item Type: Article
Divisions : Faculty of Physical Sciences and Engineering > Electronics and Computer Science > NANO
ePrint ID: 260364
Accepted Date and Publication Date:
June 2001Published
Date Deposited: 25 Jan 2005
Last Modified: 27 Mar 2014 20:03
Further Information:Google Scholar

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