A Novel Process for Depostion of Aluminium onto Sidewalls of Silicon Trenches
Sehr, H., Evans, A.G.R., Brunnschweiler, A. and Ensell, G.J. (2000) A Novel Process for Depostion of Aluminium onto Sidewalls of Silicon Trenches. At Microfabrication 2000, Santa Clara, CA, USA,
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| Item Type: | Conference or Workshop Item (Speech) |
|---|---|
| Additional Information: | Event Dates: September 2000 |
| Divisions: | Faculty of Physical and Applied Science > Electronics and Computer Science > NANO |
| Item ID: | 260446 |
| Date Deposited: | 07 Feb 2005 |
| Last Modified: | 01 Mar 2012 11:06 |
| Contributors: | Sehr, H. (Author) Evans, A.G.R. (Author) Brunnschweiler, A. (Author) Ensell, G.J. (Author) |
| Date: | 2000 |
| Additional Information: | Event Dates: September 2000 |
| Status: | Published |
| Further Information: | Google Scholar |
| URI: | http://eprints.soton.ac.uk/id/eprint/260446 |
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