A Novel Process for Depostion of Aluminium onto Sidewalls of Silicon Trenches


Sehr, H., Evans, A.G.R., Brunnschweiler, A. and Ensell, G.J. (2000) A Novel Process for Depostion of Aluminium onto Sidewalls of Silicon Trenches. At Microfabrication 2000, Santa Clara, CA, USA,

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Item Type: Conference or Workshop Item (Speech)
Additional Information: Event Dates: September 2000
Divisions: Faculty of Physical Sciences and Engineering > Electronics and Computer Science > NANO
ePrint ID: 260446
Date Deposited: 07 Feb 2005
Last Modified: 27 Mar 2014 20:03
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/260446

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