Fabrication and test of thermal vertical bimorph actuators for movement in the wafer plane
Sehr, H, Brunnschweiler, A, Evans, A, Ensell, G and Niblock, T (2001) Fabrication and test of thermal vertical bimorph actuators for movement in the wafer plane. Journal of Micromechanics and Microengineering, 11, (4), 311-318.
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| Item Type: | Article |
|---|---|
| Additional Information: | Event Dates: October 2000 |
| Divisions: | Faculty of Physical and Applied Science > Electronics and Computer Science > NANO |
| Item ID: | 260449 |
| Date Deposited: | 07 Feb 2005 |
| Last Modified: | 15 Aug 2012 03:14 |
| Contributors: | Sehr, H (Author) Brunnschweiler, A (Author) Evans, A (Author) Ensell, G (Author) Niblock, T (Author) |
| Date: | 2001 |
| Additional Information: | Event Dates: October 2000 |
| Status: | Published |
| Further Information: | Google Scholar |
| ISI Citation Count: | 21 |
| URI: | http://eprints.soton.ac.uk/id/eprint/260449 |
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Fabrication and test of thermal vertical bimorph actuators for movement in the wafer plane. (deposited 07 Feb 2005)
- Fabrication and test of thermal vertical bimorph actuators for movement in the wafer plane. (deposited 07 Feb 2005) [Currently Displayed]
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