Fabrication and test of thermal vertical bimorph actuators for movement in the wafer plane


Sehr, H, Brunnschweiler, A, Evans, A, Ensell, G and Niblock, T (2001) Fabrication and test of thermal vertical bimorph actuators for movement in the wafer plane. Journal of Micromechanics and Microengineering, 11, (4), 311-318.

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Item Type: Article
Additional Information: Event Dates: October 2000
Divisions: Faculty of Physical Sciences and Engineering > Electronics and Computer Science > NANO
ePrint ID: 260449
Date Deposited: 07 Feb 2005
Last Modified: 27 Mar 2014 20:03
Further Information:Google Scholar
ISI Citation Count:21
URI: http://eprints.soton.ac.uk/id/eprint/260449

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