Positive and Negative Photoresist as Thick Moulds for Electroplating High Aspect Ratio 3D Structures


Elejalde, N., Grigore, L., Ensell, G.J., Evans, A.G.R., Lee, S.L. and Ogrin, F.Y. (2001) Positive and Negative Photoresist as Thick Moulds for Electroplating High Aspect Ratio 3D Structures. At Micromechanics Europe 2001, NMRC, Cork, Ireland, 04 - 06 Oct 2001.

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Item Type: Conference or Workshop Item (Speech)
Additional Information: Event Dates: 4th-6th October 2001
Divisions: Faculty of Physical and Applied Science > Electronics and Computer Science > NANO
Item ID: 260451
Date Deposited: 07 Feb 2005
Last Modified: 01 Mar 2012 11:06
Contributors: Elejalde, N. (Author)
Grigore, L. (Author)
Ensell, G.J. (Author)
Evans, A.G.R. (Author)
Lee, S.L. (Author)
Ogrin, F.Y. (Author)
Date: 2001
Additional Information: Event Dates: 4th-6th October 2001
Status: Published
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/260451

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