Design and Fabrication of Advanced Thermal Vertical Bimorph Actuators for Micropositioning
Sehr, H, Brunnschweiler, A, Evans, A, Ensell, G and Schabmueller, C (2002) Design and Fabrication of Advanced Thermal Vertical Bimorph Actuators for Micropositioning. At MME2002, Sinaia, Romania, 06 - 08 Oct 2002.
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| Item Type: | Conference or Workshop Item (Speech) |
|---|---|
| Additional Information: | Event Dates: 6th-8th October 2002 |
| Divisions: | Faculty of Physical and Applied Science > Electronics and Computer Science > NANO |
| Item ID: | 260452 |
| Date Deposited: | 07 Feb 2005 |
| Last Modified: | 02 Mar 2012 12:40 |
| Contributors: | Sehr, H (Author) Brunnschweiler, A (Author) Evans, A (Author) Ensell, G (Author) Schabmueller, C (Author) |
| Date: | 2002 |
| Additional Information: | Event Dates: 6th-8th October 2002 |
| Status: | Published |
| Further Information: | Google Scholar |
| URI: | http://eprints.soton.ac.uk/id/eprint/260452 |
Available Versions of this Item
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Fabrication and test of thermal vertical bimorph actuators for movement in the wafer plane. (deposited 07 Feb 2005)
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Fabrication and test of thermal vertical bimorph actuators for movement in the wafer plane. (deposited 07 Feb 2005)
- Design and Fabrication of Advanced Thermal Vertical Bimorph Actuators for Micropositioning. (deposited 07 Feb 2005) [Currently Displayed]
-
Fabrication and test of thermal vertical bimorph actuators for movement in the wafer plane. (deposited 07 Feb 2005)
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