Towards an electrostatically closeable reaction chamber

Schabmueller, C.G.J., Evans, A.G.R., Ensell, G.J., Brunnschweiler, A., Sehr, H. and Bu, M. (2002) Towards an electrostatically closeable reaction chamber. At Micromechanics Europe 2002, Sinaia, Romania, 06 - 08 Oct 2002.

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Item Type: Conference or Workshop Item (Poster)
Additional Information: Event Dates: 6th-8th October 2002
Divisions : Faculty of Physical Sciences and Engineering > Electronics and Computer Science > NANO
ePrint ID: 260453
Accepted Date and Publication Date:
Date Deposited: 07 Feb 2005
Last Modified: 27 Mar 2014 20:03
Further Information:Google Scholar

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