Towards an electrostatically closeable reaction chamber


Schabmueller, C.G.J., Evans, A.G.R., Ensell, G.J., Brunnschweiler, A., Sehr, H. and Bu, M. (2002) Towards an electrostatically closeable reaction chamber. At Micromechanics Europe 2002, Sinaia, Romania, 06 - 08 Oct 2002.

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Item Type: Conference or Workshop Item (Poster)
Additional Information: Event Dates: 6th-8th October 2002
Divisions: Faculty of Physical and Applied Science > Electronics and Computer Science > NANO
Item ID: 260453
Date Deposited: 07 Feb 2005
Last Modified: 02 Mar 2012 12:59
Contributors: Schabmueller, C.G.J. (Author)
Evans, A.G.R. (Author)
Ensell, G.J. (Author)
Brunnschweiler, A. (Author)
Sehr, H. (Author)
Bu, M. (Author)
Date: 2002
Additional Information: Event Dates: 6th-8th October 2002
Status: Published
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/260453

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