Time constant and lateral resonances of thermal vertical bimorph actuators
Sehr, H, Tomlin, I.S., Huang, B., Beeby, S.P., Evans, A.G.R., Brunnschweiler, A., Ensell, G., Schabmueller, C.J.G. and Niblock, T.E.G. (2002) Time constant and lateral resonances of thermal vertical bimorph actuators. Journal of Micromechanics and Microengineering, 12, (4), 410-413.
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| Item Type: | Article |
|---|---|
| Divisions: | Faculty of Physical and Applied Science > Electronics and Computer Science > NANO |
| Item ID: | 260456 |
| Date Deposited: | 07 Feb 2005 |
| Last Modified: | 01 Mar 2012 11:06 |
| Contributors: | Sehr, H (Author) Tomlin, I.S. (Author) Huang, B. (Author) Beeby, S.P. (Author) Evans, A.G.R. (Author) Brunnschweiler, A. (Author) Ensell, G. (Author) Schabmueller, C.J.G. (Author) Niblock, T.E.G. (Author) |
| Date: | 2002 |
| Status: | Published |
| Further Information: | Google Scholar |
| ISI Citation Count: | 17 |
| URI: | http://eprints.soton.ac.uk/id/eprint/260456 |
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