Time constant and lateral resonances of thermal vertical bimorph actuators


Sehr, H, Tomlin, I.S., Huang, B., Beeby, S.P., Evans, A.G.R., Brunnschweiler, A., Ensell, G., Schabmueller, C.J.G. and Niblock, T.E.G. (2002) Time constant and lateral resonances of thermal vertical bimorph actuators. Journal of Micromechanics and Microengineering, 12, (4), 410-413.

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Item Type: Article
Divisions: Faculty of Physical Sciences and Engineering > Electronics and Computer Science > NANO
ePrint ID: 260456
Date Deposited: 07 Feb 2005
Last Modified: 27 Mar 2014 20:03
Further Information:Google Scholar
ISI Citation Count:17
URI: http://eprints.soton.ac.uk/id/eprint/260456

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