Characterisation of a highly sensitive ultra-thin piezoresitive silicon cantilever probe and it's application in gas flow velocity sensing
Su, Y., Evans, A.G.R., Brunnschweiler, A. and Ensell, G. (2002) Characterisation of a highly sensitive ultra-thin piezoresitive silicon cantilever probe and it's application in gas flow velocity sensing. Journal of Micromechanics and Microengineering, 12, (6), 780-785.
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| Item Type: | Article |
|---|---|
| Divisions: | Faculty of Physical and Applied Science > Electronics and Computer Science > NANO |
| Item ID: | 260457 |
| Date Deposited: | 07 Feb 2005 |
| Last Modified: | 01 Mar 2012 11:06 |
| Contributors: | Su, Y. (Author) Evans, A.G.R. (Author) Brunnschweiler, A. (Author) Ensell, G. (Author) |
| Date: | 2002 |
| Status: | Published |
| Further Information: | Google Scholar |
| URI: | http://eprints.soton.ac.uk/id/eprint/260457 |
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