Beeby, S P, Tudor, M J, Koukharenko, E, White, N M, O'Donnell, T, Saha, C, Kulkarni, S and Roy, S
Micromachined silicon Generator for Harvesting Power from Vibrations.
At The 4th International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2004), Kyoto, Japan,
30 - 28 Nov 2004.
This paper describes the design, simulation and fabrication of an electromagnetic device for generating electrical energy from vibrations. A range of dimensions has been simulated using ANSYS in order to determine natural frequencies and material stresses. A 300µm wide paddle beam gives a natural frequency of 6.4 kHz for the mode of operation and induced stresses at maximum amplitudes are well within material limits. Ansoft's Maxwell 2D has been used to predict the voltages generated and an integrated electroplated coil of 71 turns produces 0.38V with no load. Devices are currently being fabricated and the process is described.
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