Analytical model of micromachining of brittle materials with sharp particles
Moktadir, Zak and Kraft, Michael (2005) Analytical model of micromachining of brittle materials with sharp particles. Microelectronics Journal, 36, (3-6), 608-611.
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Description/Abstract
We present an analytical model for the powder blasting of brittle materials with sharp particles. We developed a continuum equation, which describes the surface evolution during the powder blasting, into which we introduced surface energetics as the major relaxation mechanism. The experimental and the calculated erosion rates match extremely well. Also, the developed model explains why the sidewalls of a power blasted channel are not straight, e.g. have a blast lag, for which we also found a good agreement between experiments and theory.
| Item Type: | Article |
|---|---|
| Divisions: | Faculty of Physical and Applied Science > Electronics and Computer Science > NANO |
| Item ID: | 260892 |
| Date Deposited: | 18 May 2005 |
| Last Modified: | 01 Mar 2012 11:09 |
| Contributors: | Moktadir, Zak (Author) Kraft, Michael (Author) |
| Date: | March 2005 |
| Status: | Published |
| Further Information: | Google Scholar |
| ISI Citation Count: | 3 |
| URI: | http://eprints.soton.ac.uk/id/eprint/260892 |
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- Analytical model of micromachining of brittle materials with sharp particles. (deposited 18 May 2005) [Currently Displayed]
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