Realisation of electroplating moulds with thick positive SPR220-7 photoresist
Koukharenka, Elena and Kraft, Michael (2002) Realisation of electroplating moulds with thick positive SPR220-7 photoresist. At , the 4th International Conference on Material for Microelectronics and Nanoengineering, , ESPOO, Finland, , 165-168.
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| Item Type: | Conference or Workshop Item (Poster) |
|---|---|
| Additional Information: | Event Dates: 2002 |
| Divisions: | Faculty of Physical and Applied Science > Electronics and Computer Science > NANO Faculty of Physical and Applied Science > Electronics and Computer Science > EEE |
| Item ID: | 260951 |
| Date Deposited: | 07 Jun 2005 |
| Last Modified: | 01 Mar 2012 11:09 |
| Contributors: | Koukharenka, Elena (Author) Kraft, Michael (Author) |
| Date: | 2002 |
| Additional Information: | Event Dates: 2002 |
| Status: | Published |
| Further Information: | Google Scholar |
| URI: | http://eprints.soton.ac.uk/id/eprint/260951 |
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