Design and performance of a microelectromagnetic vibration-powered generator

Beeby, S P, Tudor, M J, Koukharenko, E, White, N M, O'Donnell, T, Saha, C, Kulkarni, S and Roy, S (2005) Design and performance of a microelectromagnetic vibration-powered generator. At The 13th Internation Conference on Solid-State Sensors, Actuators and Microsystems, Seoul, Korea, 09 - 05 Jun 2005. IEEE, 780-783.


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In this paper we report on the design, simulation and initial results of a microgenerator, which converts external vibrations into electrical energy. Power is generated by means of electromagnetic transduction with static magnets positioned either side of a moving coil located on a silicon structure designed to resonate laterally in the plane of the chip. In this paper the development and fabrication of a micromachined microgenerator that uses standard silicon based fabrication techniques and low cost, batch process is presented. Finite element simulations have been carried out using ANSYS to determine an optimum geometry for the microgenerator. Electromagnetic FEA simulations using Ansoft’s Maxwell 2D software have shown voltage levels of 4 to 9V can be generated from the single beam generator designs. Initial results at atmospheric pressure yield 0.5 µW at 9.81ms-2 and 9.5 kHz and emphasise the importance of reducing unwanted loss mechanisms such as air damping.

Item Type: Conference or Workshop Item (Poster)
Additional Information: Event Dates: June 5-9th
ISBNs: 0780389948
Keywords: micrmachined silicon electromagnetic power generator
Divisions : Faculty of Physical Sciences and Engineering > Electronics and Computer Science > EEE
ePrint ID: 261049
Accepted Date and Publication Date:
Date Deposited: 07 Jul 2005
Last Modified: 31 Mar 2016 14:03
AF: Thick-Film Piezoelectrics for MEMs: Optimisation & Applications
Funded by: EPSRC (GR/A10024/01)
1 October 2001 to 30 September 2006
Further Information:Google Scholar

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