IMPROVED REGISTRATION TECHNIQUE FOR FABRICATING THICK-FILM PIEZOELECTRIC SENSORS
Frood, A J M, Beeby, S P, Tudor, M J and White, N M (2005) IMPROVED REGISTRATION TECHNIQUE FOR FABRICATING THICK-FILM PIEZOELECTRIC SENSORS. In, Eurosensors XIX, Barcelona, 11 - 14 Sep 2005.
Download
![[img]](http://eprints.soton.ac.uk/style/images/fileicons/application_pdf.png) |
PDF
Download (473Kb) |
Description/Abstract
A fundamental limitation of screen printing is the achievable alignment accuracy and resolution. This paper presents details of a thick-resist process that improves both of these factors. The technique involves exposing/developing a thick resist to form the desired pattern and then filling the features with thick film material using a doctor blading process. Minimum feature sizes of <40um have been achieved with a film thickness of 100um. Registration accuracy is comparable to standard photolithographic processes.
| Item Type: | Conference or Workshop Item (Paper) |
|---|---|
| Additional Information: | Event Dates: 11th-14th September 2005 |
| Keywords: | PZT, Doctor Blading, Thick Photoresist |
| Divisions: | Faculty of Physical and Applied Science > Electronics and Computer Science > EEE |
| Item ID: | 261295 |
| Date Deposited: | 05 Oct 2005 |
| Last Modified: | 02 Mar 2012 00:36 |
| Contributors: | Frood, A J M (Author) Beeby, S P (Author) Tudor, M J (Author) White, N M (Author) |
| Date: | 2005 |
| Additional Information: | Event Dates: 11th-14th September 2005 |
| Status: | Published |
| Further Information: | Google Scholar |
| URI: | http://eprints.soton.ac.uk/id/eprint/261295 |
Actions (login required)
 |
View Item |
