Frood, A J M, Beeby, S P, Tudor, M J and White, N M
IMPROVED REGISTRATION TECHNIQUE FOR FABRICATING THICK-FILM PIEZOELECTRIC SENSORS.
In, Eurosensors XIX, Barcelona,
11 - 14 Sep 2005.
A fundamental limitation of screen printing is the achievable alignment accuracy and resolution. This paper presents details of a thick-resist process that improves both of these factors. The technique involves exposing/developing a thick resist to form the desired pattern and then filling the features with thick film material using a doctor blading process. Minimum feature sizes of <40um have been achieved with a film thickness of 100um. Registration accuracy is comparable to standard photolithographic processes.
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