IMPROVED REGISTRATION TECHNIQUE FOR FABRICATING THICK-FILM PIEZOELECTRIC SENSORS


Frood, A J M, Beeby, S P, Tudor, M J and White, N M (2005) IMPROVED REGISTRATION TECHNIQUE FOR FABRICATING THICK-FILM PIEZOELECTRIC SENSORS. In, Eurosensors XIX, Barcelona, 11 - 14 Sep 2005.

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Description/Abstract

A fundamental limitation of screen printing is the achievable alignment accuracy and resolution. This paper presents details of a thick-resist process that improves both of these factors. The technique involves exposing/developing a thick resist to form the desired pattern and then filling the features with thick film material using a doctor blading process. Minimum feature sizes of <40um have been achieved with a film thickness of 100um. Registration accuracy is comparable to standard photolithographic processes.

Item Type: Conference or Workshop Item (Paper)
Additional Information: Event Dates: 11th-14th September 2005
Keywords: PZT, Doctor Blading, Thick Photoresist
Divisions: Faculty of Physical Sciences and Engineering > Electronics and Computer Science > EEE
ePrint ID: 261295
Date Deposited: 05 Oct 2005
Last Modified: 27 Mar 2014 20:04
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/261295

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