A Multilayer Thick-film PZT Actuator for MEMs Applications


Harris, NR, Hill, M, Torah, R, Townsend, R, Beeby, SP, White, NM and Ding, J (2005) A Multilayer Thick-film PZT Actuator for MEMs Applications. At Eurosensors XIX, Barcelona, 11 - 14 Sep 2005.

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Item Type: Conference or Workshop Item (Poster)
Additional Information: Event Dates: 11-14 September 2005
Divisions: Faculty of Physical Sciences and Engineering > Electronics and Computer Science > EEE
ePrint ID: 261302
Date Deposited: 06 Oct 2005
Last Modified: 27 Mar 2014 20:04
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/261302

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