The University of Southampton
University of Southampton Institutional Repository

Suppression of boron diffusion due to carbon during rapid thermal annealing of SiGe based device materials: some comments

Suppression of boron diffusion due to carbon during rapid thermal annealing of SiGe based device materials: some comments
Suppression of boron diffusion due to carbon during rapid thermal annealing of SiGe based device materials: some comments
0022-2461
1013-1016
Karunaratne, M.S.A.
b1163151-8361-4ae9-bda1-ee1a216d50d2
Bonar, J.M.
12d01a95-92f9-4aa1-bce0-c857451cbbfe
Ashburn, P.
68cef6b7-205b-47aa-9efb-f1f09f5c1038
Willoughby, A.F.W.
5176a13b-d691-4447-85a6-fdc681118819
Karunaratne, M.S.A.
b1163151-8361-4ae9-bda1-ee1a216d50d2
Bonar, J.M.
12d01a95-92f9-4aa1-bce0-c857451cbbfe
Ashburn, P.
68cef6b7-205b-47aa-9efb-f1f09f5c1038
Willoughby, A.F.W.
5176a13b-d691-4447-85a6-fdc681118819

Karunaratne, M.S.A., Bonar, J.M., Ashburn, P. and Willoughby, A.F.W. (2006) Suppression of boron diffusion due to carbon during rapid thermal annealing of SiGe based device materials: some comments. Journal of Materials Science, 41 (3), 1013-1016.

Record type: Article

This record has no associated files available for download.

More information

Published date: March 2006
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 262476
URI: http://eprints.soton.ac.uk/id/eprint/262476
ISSN: 0022-2461
PURE UUID: fc4cb131-0e25-4b7f-ba79-1d33fc3eaf3e

Catalogue record

Date deposited: 03 May 2006
Last modified: 08 Jan 2022 17:40

Export record

Contributors

Author: M.S.A. Karunaratne
Author: J.M. Bonar
Author: P. Ashburn
Author: A.F.W. Willoughby

Download statistics

Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.

View more statistics

Atom RSS 1.0 RSS 2.0

Contact ePrints Soton: eprints@soton.ac.uk

ePrints Soton supports OAI 2.0 with a base URL of http://eprints.soton.ac.uk/cgi/oai2

This repository has been built using EPrints software, developed at the University of Southampton, but available to everyone to use.

We use cookies to ensure that we give you the best experience on our website. If you continue without changing your settings, we will assume that you are happy to receive cookies on the University of Southampton website.

×