A multilayer thick-film PZT actuator for MEMs applications
Harris, NR, Hill, M, Torah, R, Townsend, R, Beeby, SP, White, NM and Ding, J (2006) A multilayer thick-film PZT actuator for MEMs applications. Sensors and Actuators A, 132, (1), 311-316.
Download
![[img]](http://eprints.soton.ac.uk/style/images/fileicons/application_pdf.png) |
PDF
Download (720Kb) |
| Item Type: | Article |
|---|---|
| Divisions: | Faculty of Physical and Applied Science > Electronics and Computer Science > EEE |
| Item ID: | 263152 |
| Date Deposited: | 06 Nov 2006 |
| Last Modified: | 20 Aug 2012 04:13 |
| Contributors: | Harris, NR (Author) Hill, M (Author) Torah, R (Author) Townsend, R (Author) Beeby, SP (Author) White, NM (Author) Ding, J (Author) |
| Date: | November 2006 |
| Status: | Published |
| Publisher: | Elsevier |
| Further Information: | Google Scholar |
| ISI Citation Count: | 11 |
| URI: | http://eprints.soton.ac.uk/id/eprint/263152 |
Actions (login required)
 |
View Item |
