Litovski, V, Andrejevic, M and Zwolinski, M
ANN based modeling, testing and diagnosis of MEMS.
In, NEUREL 2004: SEVENTH SEMINAR ON NEURAL NETWORK APPLICATIONS IN ELECTRICAL ENGINEERING, Belgrade, Serbia,
23 - 25 Sep 2004.
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New concepts of simulation, testing and diagnosis of MEMS are proposed, intended to boost the time to market and dependability of such systems. Black-box modeling of non-electronic parts is introduced using artificial neural networks, so enabling radically faster simulation without concurrent algorithms and parallel computation. A Jumped model of the capacitive transducer, being the part of a micro-electro-mechanical capacitive pressure sensing system, is created using an ANN. Faults are then introduced to the sensing system and simulation of the fault-free and faulty circuits are demonstrated.
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