Micromachined vibratory gyroscopes controlled by a high order band-pass sigma delta modulator.

Dong, Yufeng, Kraft, Michael and Redman-White, William (2007) Micromachined vibratory gyroscopes controlled by a high order band-pass sigma delta modulator. IEEE Sensors Journal, 7, (1), 59-69.


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Abstract—This work reports on the design of novel closed-loop control systems for the sense mode of a vibratory-rate gyroscope based on a high-order sigma-delta modulator (SDM). A low-pass and two distinctive bandpass topologies are derived, and their advantages discussed. So far, most closed-loop force-feedback control systems for these sensors were based on low-pass SDM’s. Usually, the sensing element of a vibratory gyroscope is designed with a high quality factor to increase the sensitivity and, hence, can be treated as a mechanical resonator. Furthermore, the output characteristic of vibratory rate gyroscopes is narrowband amplitude- modulated signal. Therefore, a bandpass M is a more appropriate control strategy for a vibratory gyroscope than a low-pass SDM. Using a high-order bandpass SDM, the control system can adopt a much lower sampling frequency compared with a low-pass SDM while achieving a similar noise floor for a given oversampling ratio (OSR). In addition, a control system based on a high-order bandpass SDM is superior as it not only greatly shapes the quantization noise, but also alleviates tonal behavior, as is often seen in low-order SDM control systems, and has good immunities to fabrication tolerances and parameter mismatch. These properties are investigated in this study at system level.

Item Type: Article
Keywords: MEMS gyroscopes
Divisions : Faculty of Physical Sciences and Engineering > Electronics and Computer Science > NANO
ePrint ID: 263446
Accepted Date and Publication Date:
January 2007Published
Date Deposited: 15 Feb 2007
Last Modified: 31 Mar 2016 14:07
Advanced and Intelligent Interface Circuits for Capacitive MEMS Sensors - The E and S in MEMS
Funded by: EPSRC (EP/D022711/1)
Led by: Michael Kraft
1 January 2006 to 30 June 2009
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/263446

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