Force feedback linearization for higher-order electromechanical sigma-delta modulators.
Dong, Yufeng, Kraft, Michael and Redman-White, William (2006) Force feedback linearization for higher-order electromechanical sigma-delta modulators. Journal of Micromechanics and Microengineering, 16, 54-60.
Abstract A higher-order electromechanical sigma–delta modulator can greatly improve the signal-to-noise ratio compared with a second-order loop that only uses the sensing element as a loop filter. However, the electrostatic force feedback on the proof mass is inherently nonlinear, which will produce harmonics in the output spectrum and limits the total signal-to-noise and distortion ratio. High performance inertial sensors, which use sigma–delta modulators as a closed-loop control system, have strict requirements on the output signal distortion. In this paper, nonlinear effects from the force feedback and pick-off circuits are analysed and a strategy for force feedback linearization is put forward which can considerably improve the signal-to-noise and distortion ratio. A PCB prototype of a fifth-order electromechanical modulator with a bulk micromachined accelerometer was used to demonstrate the concept.
|Divisions:||Faculty of Physical and Applied Science > Electronics and Computer Science > NANO
|Date Deposited:||15 Feb 2007|
|Last Modified:||20 Jul 2012 04:28|
|Contributors:||Dong, Yufeng (Author)
Kraft, Michael (Author)
Redman-White, William (Author)
|Further Information:||Google Scholar|
|ISI Citation Count:||9|
|RDF:||RDF+N-Triples, RDF+N3, RDF+XML, Browse.|
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