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Unstable etching of Si(110) with potassium hydroxide

Unstable etching of Si(110) with potassium hydroxide
Unstable etching of Si(110) with potassium hydroxide
We present experimental data for the morphological evolution of Si(110) etched with potassium hydroxide. The observed results are interpreted using a continuum equation. The results reveal the presence of unstable etching which leads to the formation of a columnar structure on the surface. The early stage of the formation of this columnar structure can be explained by a linear theory. This instability is caused by anisotropic surface tension.
33309
Moktadir, Z
9e14f4f9-7314-4a39-9776-473806c75dd4
Sato, K
14fbcaeb-f9db-4bb6-b046-fa5e04e4b219
Moktadir, Z
9e14f4f9-7314-4a39-9776-473806c75dd4
Sato, K
14fbcaeb-f9db-4bb6-b046-fa5e04e4b219

Moktadir, Z and Sato, K (2001) Unstable etching of Si(110) with potassium hydroxide. Physical Review B, 64, 33309.

Record type: Article

Abstract

We present experimental data for the morphological evolution of Si(110) etched with potassium hydroxide. The observed results are interpreted using a continuum equation. The results reveal the presence of unstable etching which leads to the formation of a columnar structure on the surface. The early stage of the formation of this columnar structure can be explained by a linear theory. This instability is caused by anisotropic surface tension.

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More information

Published date: 2001
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 263746
URI: http://eprints.soton.ac.uk/id/eprint/263746
PURE UUID: 39bb3a75-fd7a-4d10-af14-2c1df31038dc

Catalogue record

Date deposited: 26 Mar 2007
Last modified: 08 Jan 2022 02:45

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Contributors

Author: Z Moktadir
Author: K Sato

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