Thick-film Piezoceramics and Devices
Torah, R, Beeby, S, Tudor, M and White, N (2007) Thick-film Piezoceramics and Devices. J Electroceramics
Download
Full text not available from this repository.
Description/Abstract
Over the past 20 years, thick-film (screen printed) technology has been shown to possess a variety of desirable characteristics, which are particularly suitable for the realisation of micro-sensors and actuators. In particular, thick-film sensors are noted for their robust, versatile, compact and inexpensive nature. This paper will describe how screen printed thick-films can be used as the basis for a variety of piezoelectric a transducers. It will be shown how the technology can be combined with MicroElectroMechanical Systems (MEMS) to generate new types of microengineered structure. The evolution of the technology to a successful enabling mechanism for modern-day solid state sensors is described. The paper begins with a brief overview of piezoelectric thick-films including a discussion of the main factors relating to paste formulation, characterisation and techniques for fabricating devices. There is also a description of methods for fabricating thick-films on silicon, which opens up the possibility of using thick-film technology in the field of MEMS. A number of specific sensors and actuators are described, including accelerometers, micropumps, ultrasonic motors, slip sensors for prosthetic hands, resonators, elastic wave sensors and ultrasonic separators.
| Item Type: | Article |
|---|---|
| Related URLs: | |
| Divisions: | Faculty of Physical and Applied Science > Electronics and Computer Science > EEE |
| Item ID: | 263758 |
| Date Deposited: | 27 Mar 2007 |
| Last Modified: | 21 Aug 2012 03:49 |
| Contributors: | Torah, R (Author) Beeby, S (Author) Tudor, M (Author) White, N (Author) |
| Date: | 2007 |
| Status: | Published |
| Further Information: | Google Scholar |
| ISI Citation Count: | 3 |
| URI: | http://eprints.soton.ac.uk/id/eprint/263758 |
Actions (login required)
 |
View Item |
