Moktadir, Z, Sato, K, Shimizu, T and Shikida, M
Unstable Etching Of Si(110) With Potassium Hydroxide.
In, Materials Research Society, Boston , USA,
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We present the experimental data for the morphological evolution of Si(110) etched with Potassium Hydroxide. The observed results are interpreted using a continuum equation. The results reveal the presence of unstable etching, which leads to the formation of a columnar structure on the surface. The early stage of the formation of this columnar structure can be explained by a linear theory. This instability is caused by anisotropic surface tension.
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