The University of Southampton
University of Southampton Institutional Repository

Nanofabrication of electrode arrays by electron-beam and nanoimprint lithographies

Nanofabrication of electrode arrays by electron-beam and nanoimprint lithographies
Nanofabrication of electrode arrays by electron-beam and nanoimprint lithographies
The fabrication of ordered nanoelectrode arrays using both electron-beam lithography and nanoimprint lithography is described. Arrays of nanoelectrodes with varying individual electrode diameters were produced and characterised electrochemically. Whilst both methods are highly reproducibile, nanoimprint lithography has the potential to produce devices rapidly and at low-cost. To our knowledge, this is the first report where nanoimprint lithography is employed for the production of nanoelectrode arrays for electroanalytical sensors.
1473-0197
1020-1025
Sandison, Mairi E
58a34899-1348-46e3-95d9-86256e276f9a
Cooper, Jonathan M
dc3a66ac-d235-4c32-bbaf-6b184069418e
Sandison, Mairi E
58a34899-1348-46e3-95d9-86256e276f9a
Cooper, Jonathan M
dc3a66ac-d235-4c32-bbaf-6b184069418e

Sandison, Mairi E and Cooper, Jonathan M (2006) Nanofabrication of electrode arrays by electron-beam and nanoimprint lithographies. Lab on a Chip, 6, 1020-1025.

Record type: Article

Abstract

The fabrication of ordered nanoelectrode arrays using both electron-beam lithography and nanoimprint lithography is described. Arrays of nanoelectrodes with varying individual electrode diameters were produced and characterised electrochemically. Whilst both methods are highly reproducibile, nanoimprint lithography has the potential to produce devices rapidly and at low-cost. To our knowledge, this is the first report where nanoimprint lithography is employed for the production of nanoelectrode arrays for electroanalytical sensors.

This record has no associated files available for download.

More information

Published date: June 2006
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 264535
URI: http://eprints.soton.ac.uk/id/eprint/264535
ISSN: 1473-0197
PURE UUID: 10506529-f82b-4d0f-8a42-18e997b0f177

Catalogue record

Date deposited: 27 Sep 2007
Last modified: 08 Jan 2022 05:46

Export record

Contributors

Author: Mairi E Sandison
Author: Jonathan M Cooper

Download statistics

Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.

View more statistics

Atom RSS 1.0 RSS 2.0

Contact ePrints Soton: eprints@soton.ac.uk

ePrints Soton supports OAI 2.0 with a base URL of http://eprints.soton.ac.uk/cgi/oai2

This repository has been built using EPrints software, developed at the University of Southampton, but available to everyone to use.

We use cookies to ensure that we give you the best experience on our website. If you continue without changing your settings, we will assume that you are happy to receive cookies on the University of Southampton website.

×