A Sensitivity Approach to Force Calculation in Electrostatic MEMS Devices
Li, M., Kim, D. H., Lowther, D. A. and Sykulski, J. K. (2008) A Sensitivity Approach to Force Calculation in Electrostatic MEMS Devices. IEEE Transactions on Magnetics, 44, (6), 1610-1613.
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Description/Abstract
This paper presents a novel method for the computation of force in an electrostatically operated microelectromechanical systems (MEMS) device. The approach is based on continuum design sensitivity analysis (CDSA) and can be used with any analysis system. The method, unlike that of Maxwell stresses, does not require an airgap surrounding the body. The method is applied to the calculation of the tilt angle of a MEMS micromirror, and numerical results are compared with experimental measurements on the real device.
| Item Type: | Article |
|---|---|
| ISSNs: | 0018-9464 |
| Keywords: | Continuum design sensitivity analysis (CDSA), force calculation, microelectromechanical system (MEMS) devices |
| Divisions: | Faculty of Physical and Applied Science > Electronics and Computer Science > EEE |
| Item ID: | 265844 |
| Date Deposited: | 04 Jun 2008 13:08 |
| Last Modified: | 02 Mar 2012 12:40 |
| Contributors: | Li, M. (Author) Kim, D. H. (Author) Lowther, D. A. (Author) Sykulski, J. K. (Author) |
| Date: | June 2008 |
| Status: | Published |
| Further Information: | Google Scholar |
| ISI Citation Count: | 2 |
| URI: | http://eprints.soton.ac.uk/id/eprint/265844 |
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