A Sensitivity Approach to Force Calculation in Electrostatic MEMS Devices

Li, M., Kim, D. H., Lowther, D. A. and Sykulski, J. K. (2008) A Sensitivity Approach to Force Calculation in Electrostatic MEMS Devices. IEEE Transactions on Magnetics, 44, (6), 1610-1613.


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This paper presents a novel method for the computation of force in an electrostatically operated microelectromechanical systems (MEMS) device. The approach is based on continuum design sensitivity analysis (CDSA) and can be used with any analysis system. The method, unlike that of Maxwell stresses, does not require an airgap surrounding the body. The method is applied to the calculation of the tilt angle of a MEMS micromirror, and numerical results are compared with experimental measurements on the real device.

Item Type: Article
ISSNs: 0018-9464
Keywords: Continuum design sensitivity analysis (CDSA), force calculation, microelectromechanical system (MEMS) devices
Divisions: Faculty of Physical Sciences and Engineering > Electronics and Computer Science > EEE
ePrint ID: 265844
Date Deposited: 04 Jun 2008 13:08
Last Modified: 27 Mar 2014 20:10
Further Information:Google Scholar
ISI Citation Count:2
URI: http://eprints.soton.ac.uk/id/eprint/265844

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