Batch process for the fabrication of LiNbO3 photonic crystals using proton exchange followed by CHF3 reactive ion etching
Ulliac, G, Courjal, N , Chong, H M H and De La Rue, R M (2008) Batch process for the fabrication of LiNbO3 photonic crystals using proton exchange followed by CHF3 reactive ion etching. Optical Materials, 31, (2), 196-200.
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| Item Type: | Article |
|---|---|
| ISSNs: | 0925-3467 |
| Keywords: | Lithium Niobate, Reactive ion etching, Proton exchange, Batch fabrication |
| Divisions: | Faculty of Physical and Applied Science > Electronics and Computer Science > NANO |
| Item ID: | 265983 |
| Date Deposited: | 20 Jun 2008 13:57 |
| Last Modified: | 02 Mar 2012 12:41 |
| Contributors: | Ulliac, G (Author) Courjal, N (Author) Chong, H M H (Author) De La Rue, R M (Author) |
| Date: | 11 March 2008 |
| Status: | Published |
| Publisher: | Elsevier |
| Further Information: | Google Scholar |
| ISI Citation Count: | 7 |
| URI: | http://eprints.soton.ac.uk/id/eprint/265983 |
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