Novel Thick-Film Piezoceramic Micro-Generator Based on Free-Standing Structures

White, N. M., Harris, N. R., Kok, S. L. and Tudor, M. J. (2008) Novel Thick-Film Piezoceramic Micro-Generator Based on Free-Standing Structures. At 2nd Electronics System-Integration Technology, Greenwich, London Borough of, GB, 01 - 04 Sep 2008.


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Thick-film piezoelectric free-standing structures fabricated with a combination of conventional thick-film technology and a sacrificial layer technique are presented. The structures were fabricated in the form of composite cantilevers, consisting of lead zirconate titanate (PZT) as the functional element and silver/palladium (Ag/Pd) as the electrodes. The cantilevers are free standing above a substrate and are able to operate at low levels of vibration suitable for harvesting energy from the environment. An open circuit output voltage of 130 mV was measured from a sample of length 18 mm, width 9 mm and PZT thickness of 80 micron. The sample was found to produce a maximum output electrical power of 10 nW at its resonant frequency of 237.5 Hz and acceleration level of 0.981 m/s2 when driving a 60 k? resistive load. The output power was found to increase exponentially with acceleration. At an acceleration of 9.81 ms-2, 270 nW of power was produced. The output power can be improved by attaching a proof mass at the tip of the cantilever beam. A beam having a proof mass of 1.14 g, resulted in an eight-fold improvement of output power compared to a device with no added proof mass at the same acceleration level of 0.98 ms-2.

Item Type: Conference or Workshop Item (Speech)
Additional Information: Event Dates: 1 - 4 September 2008
Divisions : Faculty of Physical Sciences and Engineering > Electronics and Computer Science > EEE
ePrint ID: 266153
Accepted Date and Publication Date:
2008Made publicly available
Date Deposited: 18 Jul 2008 10:17
Last Modified: 31 Mar 2016 14:12
Further Information:Google Scholar

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