Fabrication of fully functional AC-electroosmosis micropump with 3D high aspect ratio electrodes using only SU-8


Rouabah, Hamza A., Park, P.Y., Zaouk, R.B., Morgan, Hywel, Madou, M.J. and Green, Nicolas (2007) Fabrication of fully functional AC-electroosmosis micropump with 3D high aspect ratio electrodes using only SU-8. In, Proceedings of Micromechanics Europe (MME 2007), Guimaraes, PT, 16 - 18 Sep 2007.

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Item Type: Conference or Workshop Item (Paper)
Subjects: T Technology > TK Electrical engineering. Electronics Nuclear engineering
T Technology > TS Manufactures
Divisions: Faculty of Physical Sciences and Engineering > Electronics and Computer Science > NANO
ePrint ID: 266546
Date Deposited: 06 Aug 2008 02:32
Last Modified: 03 Aug 2015 09:37
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/266546

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