Fabrication of fully functional AC-electroosmosis micropump with 3D high aspect ratio electrodes using only SU-8.
Rouabah, Hamza, Park, P.Y, Zaouk, R.B, Morgan, Hywel, Madou, M.J and Green, Nicolas (2007) Fabrication of fully functional AC-electroosmosis micropump with 3D high aspect ratio electrodes using only SU-8. In, Proc. Micromechanics Europe, Guimaraes, Portugal,
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| Item Type: | Conference or Workshop Item (Paper) |
|---|---|
| Additional Information: | Event Dates: September 2007 |
| Divisions: | Faculty of Physical and Applied Science > Electronics and Computer Science > NANO |
| Item ID: | 266546 |
| Date Deposited: | 06 Aug 2008 02:32 |
| Last Modified: | 02 Mar 2012 11:59 |
| Contributors: | Rouabah, Hamza (Author) Park, P.Y (Author) Zaouk, R.B (Author) Morgan, Hywel (Author) Madou, M.J (Author) Green, Nicolas (Author) |
| Date: | 2007 |
| Additional Information: | Event Dates: September 2007 |
| Status: | Published |
| Further Information: | Google Scholar |
| URI: | http://eprints.soton.ac.uk/id/eprint/266546 |
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