Towards a nanostructured thermoelectric generator using ion-track lithography

Koukharenko, Elena, Li, X., Nandhakumar, Iris, Frety, N., Beeby, Steve, Cox, D., Tudor, John, Schiedt, B., Trautmann, C., Bertcsh, A. and White, Neil (2008) Towards a nanostructured thermoelectric generator using ion-track lithography. Journal of Micromechanics and Microengineering, 18, (10), 104015. (doi:10.1088/0960-1317/18/10/104015).


[img] PDF
Download (1610Kb)


This paper presents the process development towards a new generation of nanostructured thermoelectric generators for power harvesting from small temperature gradients by using a combination of traditional silicon microfabrication techniques, electroplating and submicron ion-track nanolithography. Polyimide nanotemplates with pore diameters ranging from 30 nm to 120 nm were fabricated. Preliminary results from the fabrication of poly(methyl methacrylate) (PMMA)-nanostructured templates are reported. Bi2Te3 nanowires (80 and 120 nm diameters) were electroplated into polyimide ion-track nanotemplates. Bi2Te3 nanowires of a R3 m structure, with preferential orientation in (1 1 0) crystallographic plans, were electroplated. The chemical composition of Bi2Te3 with nearly stoichiometric composition (Bi2.31Te3) was obtained. Homogeneity profiles of the chemical composition were obtained. A fine-grained observed microstructure (6–10 nm) and (1 1 0) crystalline orientation were obtained, which is extremely promising for improving the thermoelectric material properties. The thermoelectric properties of the Bi2Te3-electroplated thin films (Seebeck coefficient ?) and electrical resistivity of the Bi2Te3 bundle nanowires were found to be ?52 ?V K?1 and ?14 M cm, respectively. Polyimide (Kapton foil) and PMMA 950 photoresists were promising materials for the realization of a nanostructured thermoelectric generator on flexible and rigid substrates, respectively

Item Type: Article
Digital Object Identifier (DOI): doi:10.1088/0960-1317/18/10/104015
ISSNs: 0960-1317 (print)
1361-6439 (electronic)
Subjects: Q Science > QC Physics
Divisions : Faculty of Physical Sciences and Engineering > Electronics and Computer Science > EEE
ePrint ID: 266985
Accepted Date and Publication Date:
29 September 2008Published
Date Deposited: 16 Dec 2008 14:13
Last Modified: 31 Mar 2016 14:13
Highly-efficient thermoelectric power harvesting
Funded by: EPSRC (EP/D076250/1)
Led by: Neil Maurice White
1 November 2006 to 30 April 2010
Further Information:Google Scholar

Actions (login required)

View Item View Item

Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.

View more statistics