Co integration of Silicon Nanodevices and NEMS for Advanced Information Processing


Mizuta, Hiroshi, Nagami, Tasuku, Ogi, Jun, Pruvost, Benjamin , Garcia Ramirez, Mario, Yoshimura, Hideo, Tsuchiya, Yoshishige and Oda, Shunri (2008) Co integration of Silicon Nanodevices and NEMS for Advanced Information Processing. At 9th International Conference on Solid-State and Integrated-Circuit Technology (ICSICT2008), Beijing,

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Description/Abstract

In this paper we present our recent attempts at developing the advanced information processing devices by integrating nano-electro-mechanical (NEM)structures into conventional silicon nanodevices. Firstly, we show high-speed and nonvolatile NEM memory which features a mechanically-bistable floating gate is integrated onto MOSFETs. Secondly we discuss hybrid systems of single-electron transistors and NEM structures for exploring new switching principles.

Item Type: Conference or Workshop Item (Speech)
Divisions: Faculty of Physical and Applied Science > Electronics and Computer Science > NANO
Item ID: 267459
Date Deposited: 04 Jun 2009 08:52
Last Modified: 26 Apr 2013 04:37
Contributors: Mizuta, Hiroshi (Author)
Nagami, Tasuku (Author)
Ogi, Jun (Author)
Pruvost, Benjamin (Author)
Garcia Ramirez, Mario (Author)
Yoshimura, Hideo (Author)
Tsuchiya, Yoshishige (Author)
Oda, Shunri (Author)
Date: 2008
Status: Published
Further Information:Google Scholar
ISI Citation Count:0
URI: http://eprints.soton.ac.uk/id/eprint/267459

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