Functional silicon nanoelectronic devices co-integrated with nanoelectromechanical structures
Mizuta, Hiroshi, Tsuchiya, Yoshishige and Oda, S (2009) Functional silicon nanoelectronic devices co-integrated with nanoelectromechanical structures. At JSAP Symposium on Development of Neosilicon for 'More-than'Moore' Era, Toyama,
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| Item Type: | Conference or Workshop Item (Speech) |
|---|---|
| Divisions: | Faculty of Physical and Applied Science > Electronics and Computer Science > NANO |
| Item ID: | 267624 |
| Date Deposited: | 26 Jun 2009 17:06 |
| Last Modified: | 02 Mar 2012 13:21 |
| Contributors: | Mizuta, Hiroshi (Author) Tsuchiya, Yoshishige (Author) Oda, S (Author) |
| Date: | 10 September 2009 |
| Status: | Published |
| Further Information: | Google Scholar |
| URI: | http://eprints.soton.ac.uk/id/eprint/267624 |
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