Functional silicon nanoelectronic devices co-integrated with nanoelectromechanical structures


Mizuta, Hiroshi, Tsuchiya, Yoshishige and Oda, S (2009) Functional silicon nanoelectronic devices co-integrated with nanoelectromechanical structures. At JSAP Symposium on Development of Neosilicon for 'More-than'Moore' Era, Toyama,

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Item Type: Conference or Workshop Item (Speech)
Divisions : Faculty of Physical Sciences and Engineering > Electronics and Computer Science > NANO
ePrint ID: 267624
Accepted Date and Publication Date:
Status
10 September 2009Published
Date Deposited: 26 Jun 2009 17:06
Last Modified: 31 Mar 2016 14:15
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/267624

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