Design and Analysis of an In-Plane Resonant Nano-Electro-Mechanical Sensor for Sub-Attogram-Level Molecular Mass-Detection
Arab Hassani, Faezeh , Cobianu, Cornel, Armini, Silvia, Petrescu, Violeta, Merken, Patrick, Tsamados, Dimitrios, M. Ionescu, Adrian, Tsuchiya, Yoshishige and Mizuta, Hiroshi (2009) Design and Analysis of an In-Plane Resonant Nano-Electro-Mechanical Sensor for Sub-Attogram-Level Molecular Mass-Detection. In, 2009 International Conference on Solid State Devices and Materials (SSDM 2009), Sendai-, Japan, 07 - 09 Oct 2009.
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Description/Abstract
This paper presents the In-Plane Resonant NEM (IP R-NEM) sensor based on the mass-detection principle. The proposed sensor features a mass-detection limit of sub atto gram and the sensitivity of the order of zepto gram/Hz, more than eight orders smaller than that of recent QCM-based sensors. The sensor is designed and analyzed using the three-dimensional FEM simulation. Self-assembled linker molecules and adsorbed target molecules on the beam surface are modelled by adding an extra surface coating layer. We study two different surface detection schemes, top-and-bottom and all-around surface detection. The IP R-NEM sensor is integrated with a MOSFET for electrical detection, and the transient response is studied on the system-level using a hybrid electro-mechanical circuit simulation.
| Item Type: | Conference or Workshop Item (Paper) |
|---|---|
| Additional Information: | Event Dates: 7-9 October |
| Divisions: | Faculty of Physical and Applied Science > Electronics and Computer Science > NANO |
| Item ID: | 268045 |
| Date Deposited: | 13 Oct 2009 15:23 |
| Last Modified: | 02 Mar 2012 13:22 |
| Contributors: | Arab Hassani, Faezeh (Author) Cobianu, Cornel (Author) Armini, Silvia (Author) Petrescu, Violeta (Author) Merken, Patrick (Author) Tsamados, Dimitrios (Author) M. Ionescu, Adrian (Author) Tsuchiya, Yoshishige (Author) Mizuta, Hiroshi (Author) |
| Date: | October 2009 |
| Additional Information: | Event Dates: 7-9 October |
| Status: | Published |
| Further Information: | Google Scholar |
| URI: | http://eprints.soton.ac.uk/id/eprint/268045 |
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